Investigating the role of hydrogen in silicon deposition using an energy-resolved mass spectrometer and a Langmuir probe in an Ar/H2 radio frequency magnetron discharge: Physics of Plasmas: Vol 19, No 7
Nanomaterials | Free Full-Text | Deposition of Visible Light-Active C-Doped Titania Films via Magnetron Sputtering Using CO2 as a Source of Carbon
Evolution of microstructure and properties of TiNbCrAlHfN films grown by unipolar and bipolar high-power impulse magnetron co-sputtering: The role of growth temperature and ion bombardment - ScienceDirect
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